The extremely complex kinetics of pumping, quenching, and absorption in krypton fluoride excimer lasers is now relatively well understood. A single comprehensive kinetic model, solved approximately by analytic means and more exactly by a computer code of moderate size, is capable of simulating with great accuracy the performance of KrF lasers pumped by e‐beam sustained discharge, and self‐sustained discharge. We present the results of applications of this model to interpret and predict the limiting behavior and scaling of KrF lasers. A measure of remaining uncertainties is discussed.
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