Showing 1–1 of 1 results for author: Averty, D

Optical characterization of PZT thin films for waveguide applications

Authors: Julien Cardin, Dominique Leduc, Thomas Schneider, Cyril Lupi, Dominique Averty, Hartmut Gundel

Abstract: In order to develop an electro-optic waveguide, Pb(Zr, Ti)O3 ceramic ferroelectric thin films were elaborated by a modified sol-gel process on glass substrate. In the aim to study the optical properties of the PZT films, an accurate refractive index and thickness measurement apparatus was set up, which is called M-lines device. An evaluation of experimental uncertainty and calculation of the preci… ▽ More In order to develop an electro-optic waveguide, Pb(Zr, Ti)O3 ceramic ferroelectric thin films were elaborated by a modified sol-gel process on glass substrate. In the aim to study the optical properties of the PZT films, an accurate refractive index and thickness measurement apparatus was set up, which is called M-lines device. An evaluation of experimental uncertainty and calculation of the precision of the refractive index and thickness were developed on PZT layers. Two different processes of PZT elaboration were made and studied with this apparatus. The reproducibility of one fabrication process was tested and results are presented in this paper. △ Less

Submitted 23 May, 2014; originally announced May 2014.

Journal ref: Journal of European Ceramic Society 25, 12 (2005) 2913-2916